Si3N4粉粒度对振荡压力烧结Si3N4陶瓷的影响

doi:10.3969/j.issn.1001-1935.2022.03.008

耐火材料 ›› 2022, Vol. 56 ›› Issue (3): 214-217.DOI: 10.3969/j.issn.1001-1935.2022.03.008

Si₃N₄粉粒度对振荡压力烧结Si₃N₄陶瓷的影响

徐广平¹⁾(), 何江荣¹⁾, 刘鹏程¹⁾, 茆忠军¹⁾, 秦笑威²⁾, 谢志鹏²⁾()

1)江苏中磊节能科技发展有限公司江苏盐城 224299
2)清华大学材料学院北京 100083

收稿日期:2021-11-05 出版日期:2022-06-15 发布日期:2022-06-24
通讯作者: 谢志鹏,男,1958年生,博士,教授。E-mail: xzp@mail.tsinghua.edu.cn
作者简介:徐广平:男,1962年生,高级工程师。E-mail: 13905110699@qq.com

Effect of particle size of Si₃N₄ powder on oscillatory pressure sintered Si₃N₄ ceramics

Xu Guangping¹⁾(), He Jiangrong¹⁾, Liu Pengcheng¹⁾, Mao Zhongjun¹⁾, Qin Xiaowei²⁾, Xie Zhipeng²⁾()

1)Jiangsu Zhonglei Energy Save Science and Technology Development Co.,Ltd.,Yancheng 224299,Jiangsu,China

Received:2021-11-05 Online:2022-06-15 Published:2022-06-24
Contact: Xie Zhipeng

摘要/Abstract

摘要：

为了提高Si₃N₄陶瓷的烧结致密度,采用振荡压力烧结工艺分别在1 745和1 775 ℃制备了Si₃N₄陶瓷,主要研究了Si₃N₄粉的粒度(平均粒径分别为0.4、2.0、2.3 μm)对Si₃N₄陶瓷的显微结构和性能的影响。结果显示:1)在两种温度的振荡压力烧结工艺下,由三种不同粒度的Si₃N₄粉制备的Si₃N₄陶瓷的相对密度都很大,为99.65%~99.86%,彼此相差很小。2)由平均粒径为0.2 μm的Si₃N₄粉在1 745 ℃烧结制备的试样的微观结构最均匀,其β-Si₃N₄晶粒平均长径比、抗弯强度和维氏硬度均最大,分别达到5.0、(1 364±65) MPa和(15.72±0.8) GPa;由平均粒径为2.3 μm的Si₃N₄粉在1 745 ℃烧结制备的试样的β-Si₃N₄晶粒的平均长径比、抗弯强度和维氏硬度均最小,分别为3.3、(846±49) MPa和(13.82±0.8) GPa。

关键词: Si₃N₄陶瓷, 振荡压力烧结, 相对密度, 长径比, 抗弯强度, 维氏硬度

Abstract:

In order to obtain high sintered density,Si₃N₄ ceramics were prepared by oscillatory pressure sintering at 1 745 and 1 775 ℃,respectively.The effects of the Si₃N₄ powder particle size (average particle size of 0.4,2.0,and 2.3 μm) on the microstructure and the properties of Si₃N₄ ceramics were studied.The results show:(1)the relative density of the Si₃N₄ ceramics prepared by the Si₃N₄ powders with three different particle sizes sintered at both temperatures is large,which is 99.65%-99.86%,varying slightly;(2) the sample sintered at 1 745 ℃ with 0.2 μm Si₃N₄ powder has the most uniform microstructure,the largest average length-diameter ratio of β-Si₃N₄ grains,the highest flexural strength and Vickers hardness,which are 5.0,(1 364±65) MPa,(15.72±0.8) GPa,respectively;the sample sintered at 1 745 ℃ with 2.3 μm Si₃N₄ powder has the smallest average length-diameter ratio of β-Si₃N₄ grains,the lowest flexural strength and Vickers hardness,which are 3.30,(846±49) MPa and (13.82±0.8) GPa,respectively.

Key words: silicon nitride ceramics, oscillatory pressure sintering, relative density, grain length-diameter ratio, flexural strength, Vickers hardness

中图分类号:

TQ175.1

徐广平, 何江荣, 刘鹏程, 茆忠军, 秦笑威, 谢志鹏. Si₃N₄粉粒度对振荡压力烧结Si₃N₄陶瓷的影响[J]. 耐火材料, 2022, 56(3): 214-217.

Xu Guangping, He Jiangrong, Liu Pengcheng, Mao Zhongjun, Qin Xiaowei, Xie Zhipeng. Effect of particle size of Si₃N₄ powder on oscillatory pressure sintered Si₃N₄ ceramics[J]. Refractories, 2022, 56(3): 214-217.

图/表 8

图1 振荡压力烧结的温度、压力工艺曲线

Fig.1 Sintering curve of oscillatory pressure process

图2 不同温度烧后试样的XRD图谱

Fig.2 XRD patterns of specimens sintered at different temperatures

图3 不同粒度Si3N4粉的SEM照片

Fig.3 SEM images of Si3N4 powder with different particle sizes

图4 不同温度烧结后试样断口的SEM照片

Fig.4 SEM images of sections of specimens sintered at different temperatures

图5 不同温度烧结后试样表面经抛光和CF4离子刻蚀后的SEM照片

Fig.5 SEM images of etched polished surface of specimens sintered at different temperatures

图6 不同温度烧结后试样中β-Si3N4晶粒的长径比

Fig.6 Grain length-diameter ratio of specimens sintered at different temperatures

表1 不同温度烧结后试样的相对密度

Table 1 Relative densities of specimens sintered at different temperatures

试样编号	相对密度/%
试样编号	1 745 ℃烧后	1 775 ℃烧后
1^#	99.84	99.85
2^#	99.78	99.86
3^#	99.65	99.79

图7 不同温度烧结后试样的抗弯强度和维氏硬度

Fig.7 Flexural strength and Vickers hardness of specimens sintered at different temperatures

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Si₃N₄粉粒度对振荡压力烧结Si₃N₄陶瓷的影响

Effect of particle size of Si₃N₄ powder on oscillatory pressure sintered Si₃N₄ ceramics

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