Research process on cordierite ceramics with low thermal expansion coefficient

doi:10.3969/j.issn.1001-1935.2024.06.014

Abstract

Abstract: Cordierite ceramics,known for their low thermal expansion coefficient,good chemical stability,and high strength,have been widely applied in metallurgy,catalysts,refractories and other fields.With the advancement of the semiconductor industry,cordierite ceramics have emerged as a critical material for high-end equipment ceramic structural components.Various preparation methods of cordierite ceramics,including solid-state synthesis,sol-gel method,and melt-glass method,were briefly described.The current research status on reducing the thermal expansion coefficient of cordierite ceramics through approaches such as adjusting raw material ratios and particle sizes,doping other elements,and modifying firing processes was summarized.Additionally,the current application status of low thermal expansion coefficient cordierite ceramics in different fields was discussed,and the future research direction was prospected.

Key words: cordierite ceramics, thermal expansion coefficient, semiconductor, solid-phase synthesis method

摘要： 堇青石陶瓷具有较低的热膨胀系数、良好的化学稳定性、较高的强度等优点,在冶金、催化剂、耐火材料等领域得到广泛应用,尤其是伴随着半导体行业的发展,堇青石陶瓷已成为高端装备陶瓷结构件用关键材料。为此,简述了堇青石陶瓷的固相合成法、溶胶-凝胶法、熔融玻璃法等制备方法,综述了通过调控原料配比和粒径、掺杂其他元素、调整烧成工艺等途径降低堇青石陶瓷热膨胀系数的研究现状,并讨论了低热膨胀系数的堇青石陶瓷在不同领域中的应用现状,展望了低热膨胀系数的堇青石陶瓷未来的研究方向。

关键词: 堇青石陶瓷, 热膨胀系数, 半导体, 固相合成法

CLC Number:

TQ175

王不赖, 王峰, 白志民, 王晓波, 贺智勇. 低热膨胀系数的堇青石陶瓷研究进展[J]. 耐火材料, 2024, 58(6): 536-542.

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